Last Updated： Aggregation Period:Jan 14, 2026～Feb 10, 2026
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We respond to experimental requests from customers (such as vacuum drying and vacuum baking processes).
At Sato Vacuum Company, we have newly introduced experimental equipment that enables processing under high vacuum (×10^4Pa) and high temperature (Max 500℃), in addition to our conventional equipment, and it is permanently available for customer work sample testing.
The large-capacity oil, corrosion-resistant coating, and high cooling efficiency design prevent overheating, delay oil degradation, and extend the lifespan of the pump.
(1) Cool Running Operation: Achieved a 10°C lower operating temperature compared to competing products through an efficient cooling design and a large oil capacity. (2) Corrosion-resistant Coating: The pump module is treated with a black oxide coating, while the oil case is coated with PTFE. (3) Compared to typical rotary pumps, oil capacity is increased by approximately 40%. This dilutes corrosive gases and reduces damage to the pump. It also effectively contributes to noise reduction and heat absorption.
Oil rotary vacuum pumps that can be selected according to the user's needs!
We handle DVP's "oil rotary vacuum pumps," which are widely used in various applications in general industries. These pumps can easily create a vacuum state from atmospheric pressure to medium vacuum (approximately 105 to 10^-1 Pa), and can be selected according to the user's needs. Please feel free to contact us if you have any inquiries. 【Specifications】 ■ Exhaust speed: 25m³ to 350m³/h ■ Achievable vacuum level: 10 Pa to 1 kPa (absolute) *For more details, please download the PDF or contact us.
Prolongs the lifespan of bearings, shaft seals, timing gears, etc., through low-speed operation. High reliability with easy disassembly and assembly.
Our company designs, manufactures, and sells "dry vacuum pumps" that achieve remarkably low speeds (3600 min-1 / 60Hz, 3000 min-1 / 50Hz) thanks to our unique screw shape (Queen Bee Screw). These pumps are utilized in a wide range of fields including chemicals and pharmaceuticals, automotive and electronic components, semiconductors, and liquid crystals. You can choose products suited to your applications from our various lineups. 【Features】 - Long lifespan of bearings and other components due to low-speed operation, as well as reduced noise and vibration - Smooth exhaust without condensation or dust accumulating inside the pump - Simple structure for easy disassembly and assembly - Excellent ultimate pressure achieved, allowing for continuous operation across a wide pressure range - The gas-contacting parts exhibit excellent corrosion resistance due to special coating *For more details, please refer to the materials. Feel free to contact us with any inquiries.
This is a vacuum drying device that meets the demands of various research and development needs with a pressure of 10^1 Pa.
The exterior features a beautiful hairline finish made of all stainless steel, and it can be connected to a vacuum pump tailored to the installation location. It is a vacuum drying device that effectively utilizes space, such as on a laboratory bench.
Improved measurement accuracy! Equipped with an LED that allows for easy confirmation of the vacuum gauge's status at a glance. [ULVAC]
The G-TRAN series vacuum gauge multi-ion gauge ST2-1/ST2-2 achieves long life by maximizing the advantages of the triode type, even in harsh environments for vacuum gauges. ULVAC has developed and commercialized an ion vacuum gauge that can measure accurately for a longer time, even in severe conditions. The triode type metal ion vacuum gauge significantly reduces running costs and can also contribute to improving the yield of various processes. 【Features】 ○ Triode type metal ion vacuum gauge (patent pending) ○ Small, metal measuring element ○ Wideband measurement ○ Measuring elements with different measurement ranges can be connected ○ Accurate atmospheric pressure measurement For more details, please contact us or download the catalog.
Air-driven nozzle type vacuum packaging machine (inclined worktable type) vacuum packaging equipment for preventing oxidation and corrosion of packages.
By directly vacuum sealing the inside of the envelope through the nozzle, the work speed is fast and the operation is simple. Unlike pneumatic vacuum packaging machines, it does not require an external air compressor during operation, and it is equipped with a vacuum sensor and a digital timer that allow for fine adjustments of the vacuum level (unit: kPa) and time (unit: 0.1 seconds), as well as an internal temperature sensor that enables temperature adjustment for packaging.
Diffusion bonding of various metals! Introducing micro-diffusion bonding devices and high-frequency heating diffusion bonding furnaces.
We would like to introduce the vacuum diffusion bonding equipment handled by Atotech. The "micro diffusion bonding device," which bonds metals at the atomic level, is designed and manufactured using our vacuum technology. It is capable of bonding the same materials as well as different materials. Additionally, the "high-frequency heating diffusion bonding furnace" can efficiently perform diffusion bonding in a short time and can be used for diffusion bonding of various metals up to φ30. 【Micro Diffusion Bonding Device Specifications】 ■ Pressurization method: Weighted method using weights and levers ■ Overheating dimensions: 40φ×40H ■ Overheating method: High frequency, programmable temperature control ■ Maximum overheating temperature: 1400℃ ■ Vacuum level: ×10-5PA ■ High-frequency power supply: 20KW *For more details, please refer to the related links or feel free to contact us.
![[Case Study] Vacuum Exhaust System for Large Immersion Devices](https://image.mono.ipros.com/public/product/image/c96/2001528150/IPROS5360783233977747205.png?w=280&h=280)
Exhaust to below 10 Pa from atmospheric pressure within 7 minutes! A case where we provided our vacuum exhaust system.
We would like to introduce a case study of a "vacuum exhaust system" that uses a large Roots vacuum pump as the main pump to repeatedly evacuate the impregnation tank in a large impregnation device from atmospheric pressure to a vacuum state. In this case study, it was required to evacuate the impregnation tank with a volume of 13m³ from atmospheric pressure to below 10Pa within 7 minutes. When the set vacuum level is reached, the Roots vacuum pump is activated by a vacuum switch installed on the intake side. A relief valve that opens and closes by the weight of the valve body is provided between the intake and exhaust ports, allowing the pump to be activated from the high-pressure side. 【Features】 ■ When the set vacuum level is reached, the Roots vacuum pump is activated by a vacuum switch installed on the intake side. ■ A relief valve that opens and closes by the weight of the valve body is provided between the intake and exhaust ports, allowing the pump to be activated from the high-pressure side. ■ The motor, vacuum switch, and solenoid valve are all explosion-proof specifications. *For more details, please refer to the related links or feel free to contact us.
Excellent reproducibility and linearity, allowing for a wide range of pressure measurements! It has outstanding features as a vacuum gauge.
The "M-311HG" is an ion gauge from the transducer vacuum gauge series. Ion gauges (thermal cathode ionization vacuum gauges) have excellent reproducibility and linearity, allowing for a wide range of pressure measurements, making them outstanding as vacuum gauges. The sensor uses a proven miniature gauge (MG-2I type). 【Features】 ■ Wide pressure measurement range ■ High response analog output ■ Four emission current setting modes ■ Space-saving and low power consumption ■ A product that considers safety and the environment, compliant with RoHS and CE marking *For more details, please refer to the PDF document or feel free to contact us.
This is a new controller manufactured by Pfeiffer. It can start one to two channels of vacuum gauges and vacuum pumps (TMP or dry pumps) with a single unit.
The following vacuum gauges can be activated: - Pirani gauge - Cold cathode gauge - Full-range CC gauge - Full-range BA gauge - Capacitance gauge The following vacuum pumps can be activated: - Turbo molecular pump - Scroll pump - Diaphragm pump - Roots pump
No vibration, no noise! You can use it safely for unmanned driving at night without worrying about contaminating the exhaust system!
The "Ion Pump - Noble Pump" is an ultra-high vacuum pump. By generating cold cathode discharge in a magnetic field, ionized gas molecules are embedded in the cathode, and during collisions with the cathode material (Ti), sputtering occurs, continuously creating an active getter film for evacuation. Since it does not use any oils or organic materials, it achieves a clean vacuum without contaminating the system. 【Features】 ■ Completely oil-free ■ Ultra-high vacuum, extreme ultra-high vacuum ■ Unmanned operation ■ Exhaust of inert gases (Noble Pump) *For more details, please refer to the PDF document or feel free to contact us.
Measurement range: Cold cathode ion gauge from 5.0×10‒1 to 1×10‒6 Pa
Equipped with a discharge monitoring function that ensures reliable discharge in a high vacuum area without filament breakage. It is easy to operate with key controls, displays pressure status in digital and bar graph formats, and includes a reassuring feature that allows you to check the operating status through various messages during discharge stoppage and other situations.
Improved visibility and functionality with the new design! Suitable for automation equipment and remote control devices.
The "P-500" is a control device for operating ion pumps or noble pumps in high vacuum conditions ranging from 10^-2 Pa to 10^-4 Pa or lower. It features large green LEDs for improved visibility from a distance. While considering compatibility with conventional models, it achieves enhanced functionality and compliance with CE and RoHS standards. In addition to its comprehensive I/O functions, it is suitable for automation equipment and remote operation devices, with the possibility of supporting RS232C communication through optional board additions. 【Features】 ■ High performance ■ Comprehensive functionality ■ High compatibility ■ Communication support ■ Compliance standards: CE marking, RoHS directive compliance *For more details, please refer to the PDF materials or feel free to contact us.
High energy efficiency can be achieved with COAX technology.
The large ejector "Round Pump" achieves high energy efficiency through COAX technology. It generates a large vacuum flow rate with six COAX Si MIDI cartridges. 【Features】 ○ Small, compact, and lightweight ○ Easy installation and integration into vacuum pathways ○ Integrated hose connector adopted For more details, please contact us or download the catalog.
piSAVE onoff (energy-saving mechanism) keeps air consumption to a minimum.
The small ejector "P3010" equipped with a compressed air reduction mechanism allows for the selection of three types of MINI cartridges (Pi, Si, Xi). The piSAVE on/off (energy-saving mechanism) keeps air consumption to a minimum. 【Features】 ○ For applications that require handling of sheet metal, glass, plastic, etc., without leaks, a large hysteresis is recommended. ○ If very precise vacuum levels are required during operation, a small hysteresis is recommended. ○ The switch level of the ES mechanism is adjustable. For more details, please contact us or download the catalog.
It is a platform that allows for easy configuration of necessary and accurate control functions for the system.
The small ejector "P3010" adopts the 3-stage COAX cartridge MINI. Please select the COAX cartridge according to your application. It is suitable for rapid and reliable exhaust in a leak-free system. 【Features】 ○ Equipped with a silencer and vacuum filter ○ Slim and compact, featuring a configurable modular design ○ Lightweight For more details, please contact us or download the catalog.
Standard equipped with scanning RHEED! Two motor-driven combinatorial masks installed.
The "MC-LMBE" is a compact ultra-high vacuum laser MBE (PLD) system with high operability. It is equipped with a semiconductor laser substrate heating unit that can heat up to 1200°C. It also has two motor-driven combinatorial masks. Additionally, the load-lock chamber unit allows for easy replacement of targets and substrates in a vacuum. 【Features】 ■ High operability and compact design ■ Achievable vacuum level: 6.7×10^-7Pa (below 5×10^-9Torr) ■ Two motor-driven combinatorial masks ■ Semiconductor laser substrate heating unit capable of heating up to 1200°C ■ Six types of targets available *For more details, please refer to the PDF document or feel free to contact us.
Economic pump! Widely used!
This product is an oil-sealed, rotary vacuum pump designed for use with a mechanical booster pump. The oil-sealed rotary pump compresses gas that varies in pressure from atmospheric pressure to 0.13 to 1.3×10^-2 Pa, and then releases it into the atmosphere. Directly sealed by oil, the rotary vacuum pump offers both compactness and dust-free operation. 【Features】 ■ Usable in conjunction with a mechanical booster pump ■ Compresses gas *For more details, please refer to the catalog or feel free to contact us.
Three types of MINI cartridges (Pi, Si, Xi) are available for selection.
The small ejector "P3010" equipped with a vacuum destruction mechanism allows for the selection of three types of MINI cartridges (Pi, Si, Xi). It features a slim, compact, and configurable modular design. 【Features】 ○ Quick release volume: 3–60 cm³ ○ Comes with a silencer and vacuum filter ○ Lightweight For more details, please contact us or download the catalog.
Compact and high rigidity! Ultra-small body positioning table.
This product is a positioning table compatible with high vacuum (approximately 1×10-5 Pa). Despite its ultra-compact body that fits in the palm of your hand, it achieves high rigidity by employing cross roller guides in the guidance system and precision ball screws (preloaded) in the transmission system, ensuring stable movement. Additionally, we offer options such as brackets that can be combined in multi-axis configurations like XY and XZ axes. 【Features】 ■ Clean-compatible products are also available ■ Compact & high rigidity ■ Uses vacuum-compatible stepping motors ■ Uses vacuum-compatible photo sensors ■ Vacuum-compatible grease is selected based on the customer's application *For more details, please refer to the catalog or feel free to contact us.
This is an exhaust unit capable of evacuating from atmospheric pressure to high vacuum. [ULVAC]
The YTP series is an exhaust unit capable of evacuating from atmospheric pressure to high vacuum, using the turbo molecular pump UTM series, which employs "pivot bearings + magnetic bearings (permanent magnets)." It is available in two types: the SA type, which can be automatically evacuated with a START/STOP switch, and the manual operation M type. 【Features】 ○ Two types available: automatic operation type (YTP-SA series) and manual operation type (YTP-M series), with four selectable exhaust speeds ○ In the event of a power outage, the fore valve automatically closes and the rotary pump is automatically vented → Even after power is restored, the exhaust unit will not operate ○ The saturation vapor pressure of the fluorinated oil used in the turbo molecular pump is around 10^-11 Pa (at 20°C), making it virtually oil-free ○ The turbo molecular pump uses high-performance bearings, eliminating the need for troublesome oil changes or bearing replacements For more details, please contact us or download the catalog.
Oil rotary vacuum pump equipped with a brushless DC motor.
The "VDC Series" is an oil rotary vacuum pump equipped with a brushless DC motor. It is quieter and more energy-efficient than AC models, and also lightweight. It features a two-stage exhaust system that achieves high vacuum. The anti-backflow function prevents oil from flowing back into the vacuum side in the event of a power outage or stoppage. The adoption of a forced lubrication system ensures stable exhaust speed even near atmospheric pressure. The gas ballast mechanism prevents oil degradation and a decrease in vacuum pump performance caused by the suction of condensable gases and water vapor, extending its lifespan. With a built-in thermal protector, it provides peace of mind during continuous operation.
Easy-to-handle design allows for easy control of various film formation conditions! Six types of targets can be used.
The "PAC-LMBE" is a highly scalable ultra-high vacuum laser MBE (PLD) system. As a substrate heating unit, you can choose between infrared lamp heating and semiconductor laser heating. Six types of targets can be used. Additionally, the load-lock chamber unit allows for easy exchange of targets and substrates in a vacuum. 【Features】 ■ Highly scalable ■ Achievable vacuum level: below 6.7×10^-7Pa (5×10^-9Torr) ■ Six types of targets available ■ Easy exchange of targets and substrates in a vacuum with the load-lock chamber unit ■ Optional ports: various components can be mounted *For more details, please refer to the PDF materials or feel free to contact us.
Vacuum pump
It is an oil-sealed, rotary vacuum pump. It will be used in conjunction with a mechanical booster pump.
Lightweight and easy to handle! Compact penning vacuum gauge.
The "DG-1B" is a compact type of standard penning vacuum gauge that has been miniaturized. The "penning vacuum gauge" is a device that detects and measures discharge current in a magnetic field. Since it uses cold cathode discharge, there is no risk of filament burnout, and it will not malfunction even when switched on at atmospheric pressure. It is easy to handle and robust, making it suitable for widespread use in industrial instruments such as vacuum equipment. Additionally, improvements can be made according to customer requests. 【Features】 ■ Compact type ■ The measurement sphere uses a special alloy in the magnet ■ Small and lightweight, easy to handle ■ No filament burnout in the measurement sphere ■ Can be easily used as a pressure indicator *For more details, please refer to the PDF document or feel free to contact us.
Thanks to push-in technology, cartridges can be attached and detached without tools.
The Piab medium-sized ejector "P5010" allows for cartridge attachment and detachment without tools, thanks to COAX push-in technology. It uses a 2-stage or 3-stage COAX cartridge MIDI. Please select the COAX cartridge according to your application. 【Features】 ○ Equipped with a built-in flow-through silencer that is not affected by dirt or debris ○ Significantly reduces air consumption compared to conventional ejectors of the same size ○ Slim, compact, and features a configurable modular design ○ Lightweight For more details, please contact us or download the catalog. (Piab Japan Co., Ltd.)
Fully automatic vacuum drying and vacuum baking equipment compatible with high vacuum and high temperature. There are two types: oil diffusion pump exhaust system and turbo molecular pump exhaust system.
High vacuum and high temperature compatible fully automatic vacuum drying and vacuum baking equipment. Oil diffusion pump exhaust system (×10^3Pa)… DH-DP type vacuum dryer. Turbo molecular pump exhaust system (×10^4Pa)… DH-TP type vacuum dryer. ■ This is an automatic vacuum drying and vacuum baking device designed for production machines. It pursues reliability, safety, and operability required for production lines, while enabling high-temperature processing up to 650°C. The two types in this series primarily use different vacuum pumps: an oil diffusion pump and a turbo molecular pump, which not only differ in the achievable pressure but also in their mechanisms. Therefore, please choose the type that suits your purpose and application, especially in cases where cleanliness is required.
Vacuum-compatible positioning table <PT>
Our company conducts its own gas emission evaluations, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.
Vacuum-compatible positioning table <VT>
Our company conducts its own gas emission evaluations, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.
